China (Mainland)
Sulfur hexafluoride 99.9% CAS NO.2551-62-4
- Min.Order: 0 Metric Ton
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- Product Details
Keywords
- SF6 99.9%
- SF6 99.999%
- SULFUR HEXAFLUORIDE 99.9%-99.999%
Quick Details
- ProName: Sulfur hexafluoride 99.9%
- CasNo: 2551-62-4
- Molecular Formula: S F6
- Application: Fluorine source for high density plasm...
- ProductionCapacity: Metric Ton/Day
- Purity: 99.9%-99.999%
- LimitNum: 0 Metric Ton
- Grade: Industrial Grade,Electron Grade
Superiority
Description
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas
Gas Data
Molecular Weight 146.05
Specific Gravity(Air=1) 5.1
Applications
Fluorine source for high density plasma etching: offers high selectivity without generating
carbon by-products.
Specifications
| SF6 |
| Property | Unit | Minimum | Maximum |
| SF6 | %vol | 99.999 | -- |
| O2 | ppmv | -- | 1 |
| N2 | ppmv | -- | 3 |
| CO | ppmv | -- | 0.5 |
| CO2 | ppmv | -- | 1 |
| CF4 | ppmv | -- | 2 |
| H2O | ppmv | -- | 2 |
| HF | ppmv | -- | 0.1 |
| THC(CH4) | ppmv | -- | 1 |
Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 / 590
This is common cylinders sizes.RUIHUA fills customer owned cylinders.
Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 2551-62-4
UN Number 1080