- Product Details
Keywords
- C4F8
- C4F8 99.9-99.999%
- C318
Quick Details
- ProName: Octafluorocyclobutane
- CasNo: 115-25-3
- Molecular Formula: C4F8
- Application: Used in combination with carbon monoxi...
- ProductionCapacity: Metric Ton/Day
- Purity: 99.999%
- LimitNum: 0 Metric Ton
Superiority
Description
Halocarbon RC318, C4F8, (octafluorocyclobutane) is a nonflammable, colorless, odorless,
gas
Gas Data
Molecular Weight 200.03
Specific Gravity(Air=1) 7.3
Applications
Used in combination with carbon monoxide for selective oxide etch
Specifications
C4F8 |
Property | Unit | Minimum | Maximum |
C4F8 | %vol | 99.999 | -- |
O2 | ppmv | -- | 1 |
N2 CO CO2 | ppmv | -- | 3 |
H2O | ppmv | -- | 2 |
HF | ppmv | -- | 0.1 |
THC | ppmv | -- | 10 |
Package
Cylinder Size DOT3AA 2265-47L
Valve CGA 660
This is common cylinders sizes.RUIHUA fills customer owned cylinders.
Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 115-25-3
UN Number 1976